A Comparative Study of Microactuators Driven By Electric and Magnetic Principles
نویسندگان
چکیده
Either electric or magnetic field can be employed for micro actuation. Each type of actuation principle has its own advantages and drawbacks. This paper presents a comparative study of micro actuators driven by electric and magnetic principles. It is shown that the electrostatic and piezoelectric actuators have good scaling effects whereas the electromagnetic actuators have higher power density. Moreover, the piezoelectric actuators have the highest force/torque density. As a case study, a comparison between an axial-flux type magnetic micromotor and a travelling wave ultrasonic type is also presented.
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